ÿþ <html dir="ltr"> <head> <meta http-equiv="Content-Type" content="text/html; charset=unicode"> <meta http-equiv="Content-Language" content="en-us"> <title>MicroMachining</title> <meta name="GENERATOR" content="Microsoft FrontPage 5.0"> <meta name="ProgId" content="FrontPage.Editor.Document"> <style> <!-- li.MsoNormal {mso-style-parent:""; margin-bottom:.0001pt; font-size:12.0pt; font-family:"Times New Roman"; margin-left:0cm; margin-right:0cm; margin-top:0cm} --> </style> <meta name="Microsoft Theme" content="studio1 100, default"> <meta name="Microsoft Border" content="tlb, default"> </head> <body topmargin="10" leftmargin="10" bgcolor="#FFFFFF" text="#000000" link="#6666FF" vlink="#339933" alink="#CC6633" ><!--msnavigation--><table border="0" cellpadding="0" cellspacing="0" width="100%"><tr><td> <p align="center" style="margin-top: 0; margin-bottom: 0"><a target="_blank" href="http://www.sharif.edu"> <img border="0" src="images/sharif2.jpg" width="108" height="144"></a>&nbsp;&nbsp;&nbsp;&nbsp; <span lang="fa">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; <img border="0" src="images/amrc.JPG" width="206" height="118">&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span> &nbsp;&nbsp;&nbsp; <span lang="fa">&nbsp;&nbsp;&nbsp; </span><a target="_blank" href="http://www.idro.org"> <img border="0" src="images/idro2.JPG" width="162" height="142"></a></p> <p align="center" style="margin-top: 0; margin-bottom: 0"><font size="5"><u>A</u>dvanced <u>M</u>anufacturing <u>R</u>esearch <u>C</u>enter</font></p> <p align="center" style="margin-top: 0; margin-bottom: 0"><b><font size="5"> <img src="_derived/MicroMachining.htm_cmp_studio1100_bnr.gif" width="600" height="64" border="0" alt="MicroMachining"></font></b></p> <p align="center" style="margin-top: 0; margin-bottom: 0">&nbsp;</p> </td></tr><!--msnavigation--></table><!--msnavigation--><table dir="ltr" border="0" cellpadding="0" cellspacing="0" width="100%"><tr><td valign="top" width="1%"> <p> <a href="index.htm"><img src="_derived/home_cmp_studio1100_vbtn.gif" width="141" height="22" border="0" alt="Home"></a><br><a href="Automation.htm"><img src="_derived/Automation.htm_cmp_studio1100_vbtn.gif" width="141" height="22" border="0" alt="Automation"></a><br><a href="Manufacturing.htm"><img src="_derived/Manufacturing.htm_cmp_studio1100_vbtn.gif" width="141" height="22" border="0" alt="Advanced Manufacturing"></a><br><a href="Metrology.htm"><img src="_derived/Metrology.htm_cmp_studio1100_vbtn.gif" width="141" height="22" border="0" alt="Metrology"></a><br><img src="_derived/MicroMachining.htm_cmp_studio1100_vbtn_p.gif" width="141" height="22" border="0" alt="MicroMachining"><br><a href="TTC.htm"><img src="_derived/TTC.htm_cmp_studio1100_vbtn.gif" width="141" height="22" border="0" alt="Think Tank Company"></a><br><a href="Training.htm"><img src="_derived/Training.htm_cmp_studio1100_vbtn.gif" width="141" height="22" border="0" alt="Training"></a> </p> </td><td valign="top" width="24"></td><!--msnavigation--><td valign="top"> <p class="MsoNormal" style="text-align:justify; margin-top:0; margin-bottom:10">The Urmia MEMS Lab. / Fab. is under the construction at the city campus of <a target="_blank" href="http://www.urmia.ac.ir">Urmia University</a>, North West of Iran. The total area of the Lab. / Fab. building will be circa 2000 m<sup>2</sup> with the clean-room size of&nbsp; 285 m<sup>2</sup> in four separate rooms. The cleanness of the rooms are intended to be: class 1000 for the photolithography and class 10,000 for the furnaces, Sputter, Evaporator and Wet-etching areas. Beside Lab. / Fab. building, there will be an annex building for the Lab., Management, library, administration, lounge and classrooms with an area of about 1700 m<sup>2</sup>. </p> <p class="MsoNormal" style="text-align:justify; margin-top:0; margin-bottom:10">The idea of the MEMS Lab. / Fab. was put forward by the Pazhoheshkadeh Systemhaye Pishrafteh Sanati (AMRC), at late 1998. In mid 2000 the <a target="_blank" href="http://www.idro.org">Industrial Development and Renovation Organization</a> of Iran (IDRO) accepted it as a joint project with the Urmia University to be executed by AMRC. The construction of the building was started on mid 2001. The plan is to have the clean rooms running by mid 2003.</p> <p class="MsoNormal" style="text-align:justify; margin-top:0; margin-bottom:10">The activities will focus on developing various types of the Micro-machined sensors for the automotive and industry applications such as: Pressure sensors, Accelerometers for air bag actuation, Thermometers and Gas sensors. The researchers will be mainly selected from the postgraduate students of the Urmia University working for their dissertation projects leading to the masters and Ph.D. degrees supervised by the university professors.</p> <!--msthemelist--><table border="0" cellpadding="0" cellspacing="0" width="100%"> <!--msthemelist--><tr><td valign="baseline" width="42"><img src="_themes/studio1/stubul1.gif" width="10" height="10" hspace="16" alt="bullet"></td><td valign="top" width="100%"> <h1 style="text-align:justify; margin-top:10; margin-bottom:0"><!--mstheme--><font color="#008000"><span style="font-weight: 400"><font size="4"> Activities</font></span><!--mstheme--></font></h1> <!--msthemelist--></td></tr> <!--msthemelist--></table> <p class="MsoNormal" style="text-align:justify; margin-top:0; margin-bottom:10">To familiarize the students with the technology of the micromachining, special lectures and topics are running at the Department of Electrical Engineering-Urmia University. The candidate students may work their thesis on Micromachining. The designed sophisticated MEMS structures can be fabricated overseas and the measured results may be compared to the calculated and the simulated results providing a good experience for the designers. The current MEMS Lab. / Fab. projects include:</p> <ol style="margin-top: 0cm; margin-bottom: 0cm" start="1" type="1"> <li class="MsoNormal" style="text-align: justify"> <p style="text-align: justify; margin-top:0; margin-bottom:10" class="MsoNormal">A novel capacitive presser sensor for the automobile engine oil pressure measurement. It is already designed and ready for the fabrication. The simulated results predict a good linearity and sensitivity for the sensor. </li> <li class="MsoNormal" style="text-align: justify"> <p style="margin-top: 0; margin-bottom: 10; text-align:justify" class="MsoNormal">Pizoresistive pressure sensor for automotive applications.</li> <li class="MsoNormal" style="text-align: justify"> <p style="margin-top: 0; margin-bottom: 10; text-align:justify" class="MsoNormal">Micro-relay for the communication applications. </li> <li class="MsoNormal" style="text-align: justify"> <p style="margin-top: 0; margin-bottom: 10; text-align:justify" class="MsoNormal">Temperature sensor for the automotive applications.</li> <li class="MsoNormal" style="text-align: justify"> <p style="margin-top: 0; margin-bottom: 10; text-align:justify" class="MsoNormal">Mass flow-meter for gas flow measurement.</li> <li class="MsoNormal" style="text-align: justify"> <p style="margin-top: 0; margin-bottom: 10; text-align:justify" class="MsoNormal">Micro pump for medical applications.</li> <li class="MsoNormal" style="text-align: justify"> <p style="margin-top: 0; margin-bottom: 10; text-align:justify" class="MsoNormal">Packaging techniques for the pressure sensors for automotive applications.</li> </ol> <!--msthemelist--><table border="0" cellpadding="0" cellspacing="0" width="100%"> <!--msthemelist--><tr><td valign="baseline" width="42"><img src="_themes/studio1/stubul1.gif" width="10" height="10" hspace="16" alt="bullet"></td><td valign="top" width="100%"> <h1 style="text-align:justify; margin-top:10; margin-bottom:0"><!--mstheme--><font color="#008000"><font size="4"><span style="font-weight: 400"> Facilities</span></font><!--mstheme--></font></h1> <!--msthemelist--></td></tr> <!--msthemelist--></table> <p class="MsoNormal" style="margin-top: 0; margin-bottom: 10"><span dir="LTR"><b>Purchased Equipment: </b></span>The following equipment have already been purchased:</p> <ol style="margin-top: 0cm; margin-bottom: 0cm" start="1" type="1"> <li class="MsoNormal"><b>Wire bonder</b></li> </ol> <p align="center"><img border="0" src="images/image011.jpg" width="315" height="232"></p> <ol start="2"> <li><b>Evaporator</b></li> <li class="MsoNormal"><b>Sputtering System</b></li> <li class="MsoNormal"><b>Diffusion and Oxidation Furnaces</b></li> <li class="MsoNormal"><b>Mask Aligner</b></li> <li class="MsoNormal"><b>Optical Microscope </b></li> </ol> <p align="center"><img border="0" src="images/image012.jpg" width="276" height="297"></p> <ol start="7"> <li class="MsoNormal"><b>Probe Station</b></li> </ol> <p align="center"><img border="0" src="images/image013.jpg" width="312" height="262"></p> <ol start="8"> <li class="MsoNormal"><b>Spin Coater</b></li> </ol> <p class="MsoNormal" align="justify"> <span dir="LTR"><b>The Equipment to be Purchased:</b></span></p> <ol> <li> <p style="margin-top: 0; margin-bottom: 0">Manual Wafer Dicing</li> <li> <p style="margin-top: 0; margin-bottom: 0">LPCVD Polysilicon and Si3N4 Deposition System</li> <li> <p style="margin-top: 0; margin-bottom: 0">Dry Etching System for Si3N4 and Deep through Si Wafer Etching (RIE, ICP)</li> <li> <p style="margin-top: 0; margin-bottom: 0"> &nbsp;Four Point Probe for Sheet Resistance Measurement</p> </li> <li> <p style="margin-top: 0; margin-bottom: 0"> &nbsp;Anodic Bonding of Si-Si and Si-Glass System</p> </li> <li> <p style="margin-top: 0; margin-bottom: 0"> &nbsp;IV and CV Measurement Systems</p> </li> <li> <p style="margin-top: 0; margin-bottom: 0"> Wet-Etching System</p> </li> <li> <p style="margin-top: 0; margin-bottom: 0"> Flip Chip Bonding System</p> </li> <li> <p style="margin-top: 0; margin-bottom: 0"> Thickness Measurement System</p> </li> <li> <p style="margin-top: 0; margin-bottom: 0"> Four Point Probe</p> </li> <li> <p style="margin-top: 0; margin-bottom: 0"> Ovens</p> </li> </ol> <!--msnavigation--></td></tr><!--msnavigation--></table><!--msnavigation--><table border="0" cellpadding="0" cellspacing="0" width="100%"><tr><td> <p> &nbsp;</p> <p> <nobr>[&nbsp;<a href="index.htm" target="">Home</a>&nbsp;]</nobr> <nobr>[&nbsp;<a href="Automation.htm" target="">Automation</a>&nbsp;]</nobr> <nobr>[&nbsp;<a href="Manufacturing.htm" target="">Advanced&nbsp;Manufacturing</a>&nbsp;]</nobr> <nobr>[&nbsp;<a href="Metrology.htm" target="">Metrology</a>&nbsp;]</nobr> <nobr>[&nbsp;MicroMachining&nbsp;]</nobr> <nobr>[&nbsp;<a href="TTC.htm" target="">Think&nbsp;Tank&nbsp;Company</a>&nbsp;]</nobr> <nobr>[&nbsp;<a href="Training.htm" target="">Training</a>&nbsp;]</nobr></p> <h5><!--mstheme--><font color="#666633">Send mail to <a href="mailto:amrc@sina.sharif.edu" style="text-decoration: none"> amrc@sharif.edu</a> or<a href="mailto:h_abedi@mehr.sharif.edu" style="text-decoration: none"><span lang="fa"> </span>h_abedi@mehr.sharif.edu</a> with questions or comments about this web site.<br> Copyright © 2002 Advanced Manufacturing Research Center<br> Last modified: 06-09-2003 <!--mstheme--></font></h5> </td></tr><!--msnavigation--></table></body> </html>